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Plasma-Assisted Atomic Layer Deposition: Basics, Opportunities, and Challenges: Journal of Vacuum Science & Technology A: Vol 29, No 5
Plasma-Assisted Atomic Layer Deposition: Basics, Opportunities, and Challenges: Journal of Vacuum Science & Technology A: Vol 29, No 5
PDF) Plasma Surface Modification of Polyimide Films as Flexible Substrates for Solar Cell Applications | Erkan Aydin - Academia.edu
Figure 3 from In Situ Control of Oxygen Vacancies in TaOx Thin Films via Plasma-Enhanced Atomic Layer Deposition for Resistive Switching Memory Applications. | Semantic Scholar
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